■Digital pick up (SEF3500D/SEF3500DK)
Digital scales are installed on both X and Z axis
Measuring range 58mm, Resolution 0.05μm.
High accuracy measurement can be performed.
■Operation support
Minimum display value is 0.1μm on remote
controller. Support the fine positioning.
■Many analysing functions
Ball screw analysis, *Aspheric form analysis,
*Master comparison analysis
Note)*Mark: Option in case of SEF3500/3500K.
Digital scales are installed on both X and Z axis
Measuring range 58mm, Resolution 0.05μm.
High accuracy measurement can be performed.
■Operation support
Minimum display value is 0.1μm on remote
controller. Support the fine positioning.
■Many analysing functions
Ball screw analysis, *Aspheric form analysis,
*Master comparison analysis
Note)*Mark: Option in case of SEF3500/3500K.