EC1650H furnish full of ingenuity for measuring with "high accuracy and quickly". EC1650 is economy, EC1750 is high precision type.
-High resolution
-2CR normal type, 2CR phase correct and Gauss filter supplied
-Mechanism / system Porous static pressure air bearing system / table rotation type
-Rotation accuracy (0.04 + 0.0005H) μm
H: height from table surface (mm)
-Max. measuring diameter φ368 mm both inner and outer diameters
-Loading capacity 20 kg
-Z traverse range 300 mm (at the use of b-type stylus arm)
** In case of EC1650
-High resolution
-2CR normal type, 2CR phase correct and Gauss filter supplied
-Mechanism / system Porous static pressure air bearing system / table rotation type
-Rotation accuracy (0.04 + 0.0005H) μm
H: height from table surface (mm)
-Max. measuring diameter φ368 mm both inner and outer diameters
-Loading capacity 20 kg
-Z traverse range 300 mm (at the use of b-type stylus arm)
** In case of EC1650